Fluorination effects on tribological characteristics of hydrogenated amorphous carbon thin films

نویسنده

  • M. Rubio-Roy
چکیده

The main effect of the introduction of fluorine to diamond-like carbon (FDLC) thin films is the reduction in surface free energy (SFE). Regarding tribological properties, frequent allusions to low friction are found in the literature. However, studies proving a direct relationship between fluorine content in DLC films and macroscopic friction reduction are hard to find, while others state fluorine does not affect friction significantly. The present study completes a previous one, in which we introduced fluorine leading to a reduction in SFE, and establishes which is the relationship between films’ fluorination degree and their tribological characteristics. In order to complete the study, optical emission actinometry measurements were carried out, and plasma composition results are discussed in terms of their relationship with chemical properties of the films.

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تاریخ انتشار 2008